Logic Chip Including Embedded Magnetic Tunnel Junctions

ABSTRACT

An embodiment integrates memory, such as spin-torque transfer magnetoresistive random access memory (STT-MRAM) within a logic chip. The STT-MRAM includes a magnetic tunnel junction (MTJ) that has an upper MTJ layer, a lower MTJ layer, and a tunnel barrier directly contacting the upper MTJ layer and the lower MTJ layer; wherein the upper MTJ layer includes an upper MTJ layer sidewall and the lower MTJ layer includes a lower MTJ sidewall horizontally offset from the upper MTJ layer. Another embodiment includes a memory area, comprising a MTJ, and a logic area located on a substrate; wherein a horizontal plane intersects the MTJ, a first Inter-Layer Dielectric (ILD) material adjacent the MTJ, and a second ILD material included in the logic area, the first and second ILD materials being unequal to one another. Other embodiments are described herein.

This application is a continuation of U.S. patent application Ser. No.13/994,715, filed Jun. 15, 2013, which is a §371 National Stage Entry ofInternational Application No. PCT/US2013/031994, filed Mar. 15, 2013.The content of each of the above applications is hereby incorporated byreference.

TECHNICAL FIELD

Embodiments of the invention are in the field of semiconductor devicesand, in particular, logic chips having embedded memory.

BACKGROUND

Integrating memory directly onto a logic chip (e.g., microprocessorchip) enables wider buses and higher operation speeds compared to havingphysically separate logic and memory chips. Such memory may includetraditional charge-based memory technologies such as dynamicrandom-access memory (DRAM) and NAND Flash memory.

BRIEF DESCRIPTION OF THE DRAWINGS

Features and advantages of embodiments of the present invention willbecome apparent from the appended claims, the following detaileddescription of one or more example embodiments, and the correspondingfigures, in which:

FIG. 1 depicts a logic chip including embedded magnetic tunnel junctionsin an embodiment of the invention.

FIGS. 2-23 depict a process for fabricating a logic chip includingembedded magnetic tunnel junctions in an embodiment of the invention.

FIG. 24 depicts a magnetic tunnel junction in an embodiment of theinvention.

FIG. 25 depicts a system for use with embodiments of the invention.

DETAILED DESCRIPTION

Reference will now be made to the drawings wherein like structures maybe provided with like suffix reference designations. In order to showthe structures of various embodiments more clearly, the drawingsincluded herein are diagrammatic representations of integrated circuitstructures. Thus, the actual appearance of the fabricated integratedcircuit structures, for example in a photomicrograph, may appeardifferent while still incorporating the claimed structures of theillustrated embodiments. Moreover, the drawings may only show thestructures useful to understand the illustrated embodiments. Additionalstructures known in the art may not have been included to maintain theclarity of the drawings. “An embodiment”, “various embodiments” and thelike indicate embodiment(s) so described may include particularfeatures, structures, or characteristics, but not every embodimentnecessarily includes the particular features, structures, orcharacteristics. Some embodiments may have some, all, or none of thefeatures described for other embodiments. “First”, “second”, “third” andthe like describe a common object and indicate different instances oflike objects are being referred to. Such adjectives do not imply objectsso described must be in a given sequence, either temporally, spatially,in ranking, or in any other manner. “Connected” may indicate elementsare in direct physical or electrical contact with each other and“coupled” may indicate elements co-operate or interact with each other,but they may or may not be in direct physical or electrical contact.Also, while similar or same numbers may be used to designate same orsimilar parts in different figures, doing so does not mean all figuresincluding similar or same numbers constitute a single or sameembodiment. Terms such as “upper” and “lower” “above” and “below” may beunderstood by reference to the illustrated X-Z coordinates, and termssuch as “adjacent” may be understood by reference to X-Y coordinates orto non-Z coordinates.

As stated above, integrating memory directly onto a logic chip hasadvantages. Such memory may include DRAM and NAND Flash memory. However,DRAM and NAND Flash memory have scalability issues related toincreasingly precise charge placement and sensing requirements, andhence embedding charge-based memory directly onto a high performancelogic chip is problematic at, for example, sub-20 nm technology nodes.

An embodiment includes a logic chip integrated with a memory; howeverthe memory scales to smaller geometries than possible with traditionalcharge-based memories. In one embodiment the memory is a spin-torquetransfer magnetoresistive random access memory (STT-MRAM), which relieson resistivity rather than charge as the information carrier. Morespecifically, an embodiment includes at least one STT-MRAM memoryembedded within a back-end interconnect layer of a logic chip (e.g.,processor). The at least one STT-MRAM memory may include at least oneSTT-MRAM array having at least one magnetic tunnel junction (MTJ). Othermemories besides STT-MRAM, such as resistive RAM (RRAM), are used inother embodiments.

An embodiment integrates a STT-MRAM within a logic chip, where thememory includes a MTJ that has an upper MTJ layer, a lower MTJ layer,and a tunnel barrier directly contacting the upper MTJ layer and thelower MTJ layer; wherein the upper MTJ layer includes an upper MTJ layersidewall and the lower MTJ layer includes a lower MTJ sidewallhorizontally offset from the upper MTJ layer. Another embodimentincludes a memory area, comprising a MTJ, and a logic area located on asubstrate; wherein a horizontal plane intersects the MTJ, a firstInter-Layer Dielectric (ILD) material adjacent the MTJ, and a second ILDmaterial included in the logic area, the first and second ILD materialsbeing unequal to one another. Other embodiments are described herein.

FIG. 1 depicts a logic chip including embedded MTJs in an embodiment.Although MTJs may comprise multiple layers of very thin metal films, fordiscussion purposes the MTJ film stack is divided into four portions inFIG. 1: “bottom MTJ” 140 (the bottom layer of the MTJ), “tunnel barrier”135, “top MTJ” 125 (the top layer of the MTJ), and hardmask layer 130.FIG. 1 shows three MTJs all included in M2 metal layer 165. The threeMTJs are included on silicon substrate 195 and various build up layersgenerally represented by layer 190. The three MTJs are shown as beingembedded in M2 165 for discussion purposes but could be embedded inother interconnect layers such as metal layers M1 180, M3 150, and thelike.

For clarity purposes some details are not labeled in FIG. 1 but thosedetails will become clearer when discussing a manufacturing process forthe device of FIG. 1 using FIGS. 2-23. For example, although there areseveral spacer portions in FIG. 1 possibly only one such portion islabeled for purposes of clarity. However, other portions may be labeledin one or more of FIGS. 2-23.

In the embodiment of FIG. 1 sidewall spacer 120 is located along theedges of patterned hardmask 130 and top MTJ 125 films. Sidewall spacer120 protects the edges of top MTJ 125 films from oxidation and/orcorrosion.

In an embodiment there is horizontal separation between the edges ofhardmask 130 and top MTJ 125 films compared to the edges of tunnelbarrier 135 and bottom MTJ 140 films. This horizontal separationprovides a margin with respect to top MTJ-to-bottom MTJ shorting.

An embodiment includes remnants of polish-stop film 115 on the edges oftunnel barrier 135 and bottom MTJ 140 films. Film 115 protects tunnelbarrier 135 film and bottom MTJ 140 films from sidewall oxidation and/orcorrosion.

An embodiment retains the same regular low-k ILD material 155, 170, 185in logic area 105 (e.g., processor) and memory layer 110 that includesembedded MTJs. Doing so helps the embodiment meet stringent RC delayrequirements of modern high performance logic chips. However, area 110also includes flowable oxide layer 145, which provides an ILD not foundin area 105 (or at least portions of area 105).

FIG. 1 shows four elements: (1) sidewall spacer 120, (2) horizontalseparation between the edges of hardmask 130 and top MTJ 125 filmscompared to the edges of tunnel barrier 135 and bottom MTJ 140 films,(3) remnants of polish-stop film 115 on the edges of tunnel barrier 135and bottom MTJ 140 films, and (4) the same regular low-k ILD material155, 170, 185 in logic area 105 (e.g., processor) and memory layer 110,other embodiments need not include all of these elements. Otherembodiments may include any combination or subset of these four elementssuch as, for example, elements (1) and (2) but not elements (3) and/or(4).

FIGS. 2-23 depict a process for fabricating a logic chip area 105including an embedded MTJ area 110 in an embodiment of the invention. InFIG. 2 the process sequence begins with wafer 195 on which the topmostsurface has a patterned interconnect layer within M1 layer 180. M1 layer180 is included within ILD 185. For the purposes of discussion theprocess flow is shown beginning with a wafer having a patterned M1interconnect on its topmost surface, but the topmost surface could besome other interconnect layer (i.e. M2, M3, M4 and the like). Wafer 195may also have other back-end and front-end layers 190 beneath thetopmost patterned interconnect layers.

In FIG. 3 etch-stop film 175 is deposited followed by low-k ILD 170material. In an embodiment, ILD material 170 will ultimately remain inthe area of the wafer where the logic circuits are located (area 105).Areas 105, 110 may be identified in a variety of ways. For example, area110 may include a STT-RAM bit cell array where MTJs are visible and afairly regular bit cell transistor layout is present. In contrast, thetransistor layout in area 105 is not so regular (e.g., not included in arepetitively structured array as is the case with memory) and few to noMTJs are present.

ILD 170 satisfies various technical requirements for ILD material(s)used in the corresponding interconnect layer of area 105. Such technicalrequirements may concern, for example, electrical properties (e.g.,dielectric constant, breakdown voltage) and/or mechanical properties(e.g., modulus, toughness, film stress) dictated by design concerns forarea 105. In various embodiments etch-stop materials include, forexample, silicon nitride, silicon carbide, carbon-doped silicon nitride,and the like. ILD material 170 may be any ILD material whose propertiesare suitable for use in the logic circuits and interconnect layer ofarea 105. Embodiments include ILD materials such as, for example,silicon oxide, fluorinated silicon oxide (SiOF), and carbon-doped oxide.

In FIG. 4 resist layer 109 is applied and patterned to mask off logiccircuit area 105 from the area 110 where MTJs will be fabricated. InFIG. 5 low-k ILD 170 and etch-stop layer 175 are etched away in theunmasked areas to expose underlying M1 180 interconnect layer by using adry etch process and any resist residue is then removed using cleanprocessing.

In FIG. 6 the MTJ metal film stack (layers 140, 135, 125) is depositedfollowed by the deposition of hardmask 130 material. In an embodimentthe method of depositing the MTJ metal film stack is physical vapordeposition (PVD) sputtering. In an embodiment bottom MTJ film 140consists of (from bottom to top) 3 nm tantalum (Ta); 20 nm platinummanganese (PtMn); 2.3 nm cobalt iron (Co₇₀Fe₃₀); 0.8 nm Ruthenium (Ru);2.5 nm cobalt iron boron (Co₆₀Fe₂₀B₂₀), tunnel barrier 135 includes 1.2nm magnesium oxide (MgO), top MTJ 125 film includes 2.5 nm Co₆₀Fe₂₀B₂₀;and hardmask 130 material includes 50 nm Ta. In such an embodiment thehardmask (1) can be deposited sequentially within the same sputter toolthat is used for depositing the MTJ metal film stack, and (2) isconductive. Regarding the sputter tool, since all films in the hardmask,top MTJ, tunnel barrier, and bottom MTJ are sputtered films, all ofthose films may be deposited sequentially inside one sputter toolwithout breaking vacuum. An advantage of not breaking vacuum is that thesurfaces of the various metal films do not oxidize, and hence there islittle to no deterioration of the electrical properties of the MTJlayers. Regarding the conductive nature of the hardmask, as a result ofthe conductivity of the hardmask the hardmask does not need to beremoved later in the flow when an electrical connection needs to be madeto the top surface of the MTJ. Other embodiments have other thicknessesfor bottom MTJ 140, tunnel barrier 135, and/or top MTJ 125 to alter theMTJ electrical characteristics as desired. Likewise, other materials maybe used in bottom MTJ 140, tunnel barrier 135, top MTJ 125, and hardmask130 to obtain different MTJ electrical characteristics, as desired.

In FIG. 7 planarizing coating 111 is applied. In FIG. 8a planarizingcoating overburden is removed using a chemical-mechanical polishing(CMP) process. Note that planarizing coating 111 material remains insidea recessed area of the wafer. Bottom MTJ layer 140 is horizontallyadjacent ILD 170 and etch-stop 175. Bottom MTJ layer 140 is verticallyadjacent and “on” ILD 185, which may be located over other variouslayers 190 and substrate 195. Alternative embodiments may forego CMP ofportions such as portion 111. Alternative embodiments may forego CMP ofsacrificial light absorbing material (SLAM) deposited in, for example,the recessed area of the wafer.

In FIG. 9 exposed hardmask 130, top MTJ 125, tunnel barrier 135, andbottom MTJ 140 films are removed using reactive-ion etching (RIE) dryetch techniques, stopping at low-k ILD 170. In FIG. 10 remainingplanarizing material 111 is removed using, for example, wet or dry etchtechniques. In FIG. 11 resist layer 112 is applied and patterned overthose areas of the wafer surface where MTJs are desired (area 110). InFIG. 12 exposed hardmask 130 material is etched using, for example, dryetch techniques and any remaining resist is removed using, for example,a plasma ash process. In FIG. 13, top MTJ film 125 is etched using, forexample, RIE dry etch techniques, stopping at tunnel barrier 135material. In FIG. 14 the wafer surface is covered with “spacer” 120film, such as, for example, silicon nitride, silicon oxide, siliconoxynitride, silicon carbide, or carbon doped silicon nitride. In FIG. 15an anisotropic dry etch process is used to remove spacer 120 materialfrom all of the horizontal surfaces of the wafer while leaving thespacer material on the vertical sidewalls. In FIG. 16 tunnel barrier 135and bottom MTJ films 140 are etched using, for example, RIE dry etchtechniques, stopping on the underlying M1 180 interconnect and/or ILD185 materials. In FIG. 17 the wafer surface is covered with polish-stopmaterial 115, such as silicon nitride or silicon carbide. Note that film115 acts as a flowable oxide polish stop (explained further at FIG. 19),and (2) it protects the etched sidewalls of the tunnel barrier andbottom MTJ films from oxidation/corrosion.

In one embodiment the processes corresponding to FIGS. 12-17 occurin-situ in a large cluster tool without breaking vacuum in order tominimize any chance of oxidation or corrosion of the etched MTJsidewalls.

In FIG. 18 the wafer surface is covered with flowable oxide material145, which may fill any gaps between MTJs. In one embodiment flowableoxide material 145 may include polymer hydrogen silsesquioxane (HSQ)solution in methyl isobutyl ketone (MIBK), but other embodiments are notso limited.

In FIG. 19 flowable oxide 145 overburden is removed using, for example,an oxide CMP process that selectively stops on underlying polish-stop115 material. In an embodiment flowable oxide material 145 remains inthe gaps between the MTJs. In FIG. 20 exposed polish-stop 115 materialis removed using, for example, a plasma etch process. In FIG. 21additional low-k ILD material 170 is deposited onto the wafer, such thatthe total low-k ILD thickness is built up to a value desired for formingthe regular interconnect structures in the logic circuit areas. Thisvalue is highly variable and depends on, for example, which metal layerthe MTJs are integrated into. In one embodiment, the total low-k ILDthickness may be between 30-750 nm, including 50, 100, 200, 300, 400,500, 600, 700 nm thicknesses.

In FIG. 22 trenches and via openings are fabricated into low-k ILDmaterial 170 using, for example, dual damascene patterning. In FIG. 23copper interconnect structures are formed inside the trenches and viaopenings using, for example, dual damascene barrier/seed deposition,copper electroplating, and copper CMP processes.

The process then produces the device included in FIG. 1, whereinsubsequent etch stop 160 is formed and copper interconnect layer(s) 123are formed in M3 layer 150. Furthermore, ILD layer(s) 155 are formed, asdesired, using, for example, dual damascene process techniques.

FIG. 24 includes a less idealized version of a portion of FIG. 1. InFIG. 24 tunnel barrier 2435 is located between bottom MTJ layer 2540 andtop MTJ layer 2525. Spacer 2520 is vertically adjacent layer 2535 andhorizontally adjacent layer 2525 and hardmask 2530.

In another embodiment the same product as that of FIG. 1 is produced.The process and embodiments of FIGS. 2-6 are used. However, goingforward from the product of FIG. 6 the process differs. Namely,photoresist is applied and patterned to mask off the MTJ array area thewafer surface. For example, resist is located within the recessed areaof the wafer (i.e., between the two nearly orthogonal horizontal tovertical MTJ stack transitions shown in FIG. 6). The resist may bepatterned or deposited to be present solely within this recessed area ormay expand horizontally beyond the area. The resist may also extendabove the vertical level of the already deposited hardmask (i.e., abovethe recessed area) or be located entirely within (horizontally andvertically) the recessed area. Afterwards, the exposed hardmask as wellas portions of the top MTJ, tunnel barrier, and bottom MTJ films may beremoved and etched using RIE dry etch techniques stopping on the low-kILD. In an embodiment, an in-situ plasma ash process may be included inthe etch recipe to remove any remaining resist residue. This may resultin an embodiment similar to that of FIG. 10. From that stage theprocessed depicted in FIGS. 11-23 may be followed to further develop theembodiment.

In another embodiment the same product as that of FIG. 1 is produced.The process and embodiments of FIGS. 2-6 are used. However, goingforward from the product of FIG. 6 a resist layer is applied andpatterned over those areas of the wafer surface where MTJs are desired,directly on top of the unpatterned hardmask and MTJ film stack. Thus,for the example of FIG. 6 this would result in 3 resist pillarsrespectively located directly above the 3 metal portions that will serveas foundations for 3 MTJs (all located within the recessed area of thewafer between the two nearly orthogonal horizontal to vertical MTJ stacktransitions shown in FIG. 6).

Afterwards, the exposed hardmask material is etched using dry etchtechniques, and any remaining resist is removed using a plasma ashprocess. At this point, the entire MTJ stack layer shown in FIG. 6 isstill present, such that there is a non-recessed MTJ layer portioncoupled via vertical MTJ portions to a recessed MTJ portion. However,all hardmask material is removed except for 3 small islands of hardmasklocated what will become 3 MTJs.

Next the top MTJ film stack is etched using RIE dry etch techniquesstopping on the tunnel barrier material. Thus, the top MTJ film remainsonly in the recessed portion as well as the vertical top MTJ filmportions (that previously connected to the horizontal unrecessed top MTJlayer). Afterwards the wafer surface is covered with a “spacer” film,such as silicon nitride or carbon doped silicon nitride. Then ananisotropic dry etch process is used to remove the spacer material fromall of the horizontal surfaces of the wafer while leaving the spacermaterial on the vertical sidewalls. There are now 6 vertical sidewallslocated adjacent the remaining top MTJ and hardmask islands in therecessed area. There are also 2 vertical sidewall portions locatedadjacent the vertical top MTJ layers that are still present. Continuingon, the tunnel barrier and bottom MTJ films are now etched using RIE dryetch techniques, stopping on the underlying M1 interconnect and/or ILDmaterials. This may result in an embodiment similar to that of FIG. 16.From that stage the process depicted in FIGS. 17-23 may be followed tofurther develop the embodiment.

At locations above passages such as the following are made: “6 verticalsidewalls located adjacent the remaining top MTJ and hardmask islands inthe recessed area”. However, these are merely examples shown toillustrate what could be 6 of hundreds or thousands of MTJ portionsdepending on the product within which the MTJs are eventuallyincorporated.

Accordingly, various processes have been addressed above, any of whichmay result in the embodiment of FIG. 1.

FIG. 1 depicts a cross-section of a device having: (a) different ILDmaterials in the logic area as opposed to the MTJ array area. Forexample, a single horizontal plane intersects the 3 MTJs, ILD 170, aswell as ILD portions in logic area 105. The ILD portions in logic area105 may include ILD materials different from that of ILD 170 located inarea 110. For example, the ILD portions in logic area 105 may includesilicon oxide ILD materials and the ILD portions in MTJ area 110 mayinclude flowable oxide. However, in other embodiments the ILD materialsmay be the same.

FIG. 1 depicts a cross-section of a device having: (b) remnants of theMTJ film stack at the perimeter of the MTJ array area. For example, area126 of FIG. 1 includes horizontal and vertical portions of bottom MTJ140, horizontal and vertical portions of tunnel barrier 135, andvertical portions of top MTJ 140. While only area 126 is labeled,notably a symmetric MTJ film stack remnant is also located opposite area216 across MTJ area 110. In another embodiment stack remnants includehorizontal and vertical portions of bottom MTJ 140, horizontal andvertical portions of tunnel barrier 135, and horizontal and verticalportions of top MTJ 140. In another embodiment stack remnants includevertical portions of bottom MTJ 140, vertical portions of tunnel barrier135, and vertical portions of top MTJ 140. In another embodiment stackremnants include vertical portions of bottom MTJ 140, vertical portionsof tunnel barrier 135, and horizontal and vertical portions of top MTJ140.

FIG. 1 depicts a cross-section of a device having: (c) presence of asidewall spacer on the edges of the patterned hardmask and/or top MTJfilms. For example, there are 3 MTJs shown in FIG. 1. The top MTJ layer125 for each of the MTJs is located adjacent two vertical spacerportions (sidewall spacers). These sidewall spacers are also adjacentand on the edge of the hardmask portions that are atop the 3 MTJs.However, in other embodiments the spacers may be directly adjacent andcontacting only one of the top MTJ and hardmask layers.

FIG. 1 depicts a cross-section of a device having: (d) horizontalseparation between the edges of the top MTJ films compared to the edgesof the tunnel barrier and the bottom MTJ films. For example, for eachMTJ the overall horizontal width of the top MTJ layer is less than theoverall width of the corresponding tunnel barrier and/or the overallhorizontal width of the top MTJ layer is less than the overall width ofthe corresponding bottom MTJ layer. The differential between the widthof the tunnel barrier and top MTJ layer is equal to the width of the twospacer sidewalls. The differential between the width of the bottom MTJlayer and top MTJ layer is equal to the width of the two spacersidewalls. In some embodiments the bottom MTJ layer and the tunnelbarrier have the same widths for some or all MTJs but in otherembodiments they are not the same for some or all MTJs.

FIG. 1 depicts a cross-section of a device having: (e) remnants of thepolish-stop film on the edges of the tunnel barrier and bottom MTJfilms. For example, there are 3 MTJs shown in FIG. 1. The tunnel barrierand/or bottom MTJ layer 140 for each of the MTJs is located adjacent anddirectly contacting polish stop portions. The polish stop portions maybe vertical portions. These vertical polish stop portions may also beadjacent portions of vertical sidewall spacers.

Embodiments may have various combinations such as any combination of theimmediately aforementioned elements (a), (b), (c), (d), and/or (e).

As used herein a layer may have sublayers. For example, a top MTJ layermay actually be composed of many sublayers. For example and as explainedabove, in one embodiment MTJ film 140 consists of (from bottom to top) 3nm tantalum (Ta); 20 nm platinum manganese (PtMn); 2.3 nm cobalt iron(Co₇₀Fe₃₀); 0.8 nm Ruthenium (Ru); 2.5 nm cobalt iron boron(Co₆₀Fe₂₀B₂₀). Thus, 5 sublayers are included in MTJ film 140. Tunnelbarrier 135 includes 1.2 nm magnesium oxide (MgO) but in alternativeembodiments layer 135 may include one or more sublayers. Top MTJ 125film includes 2.5 nm Co₆₀Fe₂₀B₂₀ but in alternative embodiments thelayer may include one or more sublayers. Hardmask 130 material includes50 nm Ta but in alternative embodiments the layer may include tantalumnitride, titanium and titanium nitride and/or one or more sublayers. Forexample, an embodiment may include a top MTJ film with sublayers (1.7 nmCo60Fe20B20/5 nm Ta/5 nm Ru), a tunnel barrier (0.85 nm MgO), and abottom MTJ film with sublayers (5 nm Ta/1 nm Co60Fe20B20). Anotherembodiment may include a top MTJ film with sublayers (1.0-1.7 nmCo60Fe20B20/5 nm Ta/5 nm Ru), a tunnel barrier (0.85-0.9 nm MgO), and abottom MTJ film with sublayers (5 nm Ta/10 nm Ru/5 nm Ta/1.0-1.3 nmCo₆₀Fe₂₀B₂₀). Another embodiment may include a top MTJ film withsublayers (CoFeB), a tunnel barrier (MgO), and a bottom MTJ film withsublayers (PtMn/CoFe/Ru/CoFeB). Another embodiment may include a top MTJfilm with sublayers (CoFeB(3 nm)/Ru(7 nm)/Cu(110 nm)/Ru(2 nm)/Ta(10 nm)or CoFeB(3 nm)/Ta(8 nm)/Ru(7 nm)), a tunnel barrier with sublayers(Mg(0.4 nm)+MgO(0.6 nm)), and a bottom MTJ film with sublayers (Ta(5nm)/CuN(20 nm)/Ta(10 nm)/PtMn(15 nm)/CoFe(2.5 nm)/Ru(0.8 nm)/CoFeB(3nm)). Many other examples are possible and understood to those ofordinary skill in the art and are not described herein for purposes ofbrevity.

Embodiments may be used in many different types of systems. For example,in one embodiment a communication device (e.g., cell phone, Smartphone,netbook, notebook, personal computer, watch, camera) can be arranged toinclude various embodiments described herein. Referring now to FIG. 25,shown is a block diagram of a system in accordance with an embodiment ofthe present invention. Multiprocessor system 700 is a point-to-pointinterconnect system, and includes a first processor 770 and a secondprocessor 780 coupled via a point-to-point interconnect 750. Each ofprocessors 770 and 780 may be multicore processors. First processor 770may include a memory controller hub (MCH) and point-to-point (P-P)interfaces. Similarly, second processor 780 may include a MCH and P-Pinterfaces. The MCHs may couple the processors to respective memories,namely memory 732 and memory 734, which may be portions of main memory(e.g., a dynamic random access memory (DRAM)) locally attached to therespective processors. However, the processors may be located on thesame chip as memory as described herein. First processor 770 and secondprocessor 780 may be coupled to a chipset 790 via P-P interconnects,respectively. Chipset 790 may include P-P interfaces. Furthermore,chipset 790 may be coupled to a first bus 716 via an interface. Variousinput/output (I/O) devices 714 may be coupled to first bus 716, alongwith a bus bridge 718, which couples first bus 716 to a second bus 720.Various devices may be coupled to second bus 720 including, for example,a keyboard/mouse 722, communication devices 726, and data storage unit728 such as a disk drive or other mass storage device, which may includecode 730, in one embodiment. Code may be included in one or morememories including memory 728, 732, 734, memory coupled to system 700via a network, and the like. Further, an audio I/O 724 may be coupled tosecond bus 720.

Notably, at times herein “top MTJ” and “bottom MTJ” layers are used forpurposes of explanation, however, a MTJ can be “inverted” making the toplayer into the bottom layer (i.e., changing the viewing perspective)without deviating from innovative concepts of embodiments describedherein.

As a further example, at least one machine readable medium comprises aplurality of instructions that in response to being executed on acomputing device, cause the computing device to carry out any of themethods described herein. An apparatus for processing instructions maybe configured to perform the method of any of the methods describedherein. And an apparatus may further include means for performing any ofthe methods described herein.

Embodiments may be implemented in code and may be stored on a machinereadable storage medium having stored thereon instructions which can beused to program a system to perform the instructions. The storage mediummay include, but is not limited to, any type of disk including floppydisks, optical disks, solid state drives (SSDs), compact disk read-onlymemories (CD-ROMs), compact disk rewritables (CD-RWs), andmagneto-optical disks, semiconductor devices such as read-only memories(ROMs), random access memories (RAMs) such as dynamic random accessmemories (DRAMs), static random access memories (SRAMs), erasableprogrammable read-only memories (EPROMs), flash memories, electricallyerasable programmable read-only memories (EEPROMs), magnetic or opticalcards, or any other type of media suitable for storing electronicinstructions.

The following examples pertain to further embodiments.

Example 1 includes an apparatus comprising: a first magnetic tunneljunction (MTJ) including a first upper MTJ layer, a first lower MTJlayer, and a first tunnel barrier directly contacting a first lowersurface of the first upper MTJ layer and a first upper surface of thefirst lower MTJ layer; wherein the first upper MTJ layer includes afirst upper MTJ layer sidewall and the first lower MTJ layer includes afirst lower MTJ sidewall horizontally offset from the first upper MTJlayer sidewall by a first horizontal offset space that defines a firsthorizontal offset distance.

In Example 2, the subject matter of Example 1 can optionally include afirst spacer, having a first width equal to the first horizontal offsetdistance, directly contacts the first upper MTJ layer and the firsttunnel barrier.

In Example 3, the subject matter of Examples 1-2 can optionally includea first hardmask directly contacting a first upper surface of the firstupper MTJ layer and the first spacer.

In Example 4, the subject matter of Examples 1-3 can optionally includea first spacer is included within the first horizontal offset space.

In Example 5, the subject matter of Examples 1-4 can optionally includea monolithic substrate; a memory area including the first MTJ; a logicarea; and a first horizontal plane parallel to the first lower surfaceof the first upper MTJ layer; wherein the logic area and the memory areboth located on the monolithic substrate; wherein the first horizontalplane intersects the first MTJ, a first Inter-Layer Dielectric (ILD)material adjacent the first MTJ, and a second ILD material included inthe logic area, the first and second ILD materials being unequal to oneanother. The logic area may include logic gates and the memory area mayinclude a memory array.

In Example 6, the subject matter of Examples 1-5 can optionally includethe logic area included in a processor and the memory is spin torquetransfer magnetoresistive random access memory (STT-MRAM).

In Example 7, the subject matter of Examples 1-6 can optionally includethe first ILD material includes at least one of silicon oxide, siliconoxynitride, porous silicon oxide, fluorinated silicon oxide,carbon-doped oxide, porous carbon-doped oxide, polyimide,polynorbornene, benzocyclobutene, flowable oxide, andpolytetrafluoroethylene and the second ILD material includes anadditional at least one of silicon oxide, silicon oxynitride, poroussilicon oxide, fluorinated silicon oxide, carbon-doped oxide, porouscarbon-doped oxide, polyimide, polynorbornene, benzocyclobutene,flowable oxide, and polytetrafluoroethylene; and the first bottom MTJincludes sublayers comprising at least two of tantalum, platinummanganese; cobalt iron; Ruthenium (Ru); and cobalt iron boron.

In Example 8, the subject matter of Examples 1-7 can optionally includethe first horizontal plane intersects a first polish stop materialincluded between the first MTJ and the first ILD material.

In Example 9, the subject matter of Examples 1-8 can optionally includethe first polish stop material directly contacts at least one of thefirst tunnel barrier and the first lower MTJ layer.

In Example 10, the subject matter of Examples 1-9 can optionally includea monolithic substrate; a memory area including the first MTJ; a logicarea; and a first horizontal plane parallel to the first lower surfaceof the first upper MTJ layer; wherein a first spacer, having a widthequal to the first horizontal offset distance, directly contacts thefirst upper MTJ layer and the first tunnel barrier; wherein the logicarea and the memory are both located on the monolithic substrate;wherein the first horizontal plane intersects the first MTJ, a first ILDmaterial adjacent the first MTJ, and a second ILD material included inthe logic area, the first and second ILD materials being unequal to oneanother.

In Example 11, the subject matter of Examples 1-10 can optionallyinclude a vertical MTJ layer portion, an additional vertical MTJ layerportion, and a vertical tunnel barrier portion directly contacting thevertical MTJ layer portion and the additional vertical MTJ layerportion; wherein the vertical MTJ layer portion, the additional verticalMTJ layer portion, and the vertical tunnel barrier portion are allbetween the logic and memory areas and are all intersected by the firsthorizontal plane.

In Example 12, the subject matter of Examples 1-11 can optionallyinclude wherein at least one of the first upper MTJ layer, first lowerMTJ layer, and first tunnel barrier includes sublayers.

In Example 13, the subject matter of Examples 1-12 can optionallyinclude wherein a first spacer, having a first width equal to the firsthorizontal offset distance, directly contacts at least one of the firstupper MTJ layer and the first tunnel barrier.

In Example 14, the subject matter of Examples 1-13 can optionallyinclude a second MTJ including a second upper MTJ layer, a second lowerMTJ layer, and a second tunnel barrier directly contacting a secondlower surface of the second upper MTJ layer and a second upper surfaceof the second lower MTJ layer; wherein the second upper MTJ layerincludes a second upper MTJ layer sidewall and the second lower MTJlayer includes a second lower MTJ sidewall horizontally offset from thesecond upper MTJ layer sidewall by a second horizontal offset space thatdefines a second horizontal offset distance; a first vertical polishstop sidewall contacting at least one of the first lower MTJ layer andthe first tunnel barrier and a second vertical polish stop sidewallcontacting at least one of the second lower MTJ layer and the secondtunnel barrier; wherein the first and second vertical polish stopsidewalls are located between the first and second MTJs and a firsthorizontal plane parallel to the first lower surface of the first upperMTJ layer intersects the first and second MTJs and the first and secondvertical polish stop sidewalls.

Example 15 includes an apparatus comprising: a monolithic substrate; amemory area, comprising a magnetic tunnel junction (MTJ) that includes atunnel barrier directly contacting lower and upper MTJ layers, locatedon the substrate; and a logic area located on the substrate; wherein ahorizontal plane, which is parallel to the tunnel barrier, intersectsthe MTJ, a first Inter-Layer Dielectric (ILD) material adjacent the MTJ,and a second ILD material included in the logic area, the first andsecond ILD materials being unequal to one another. The logic area mayinclude logic gates and the memory area may include a memory array. Thelogic area may include a processor and the memory area may include amemory array.

In Example 16, the subject matter of Example 15 can optionally includewherein the upper MTJ layer includes an upper MTJ layer sidewall and thelower MTJ layer includes a lower MTJ sidewall horizontally offset fromthe upper MTJ layer sidewall by a horizontal offset space that defines ahorizontal offset distance.

In Example 17, the subject matter of Examples 15-16 can optionallyinclude a spacer, having a width equal to the horizontal offsetdistance, directly contacting the upper MTJ layer and the tunnelbarrier.

In Example 18, the subject matter of Examples 15-17 can optionallyinclude a hardmask directly contacting an upper surface of the upper MTJlayer and the spacer.

In Example 19, the subject matter of Examples 15-18 can optionallyinclude wherein the horizontal plane intersects polish stop materialincluded between the MTJ and the first ILD material.

In Example 20, the subject matter of Examples 15-19 can optionallyinclude wherein the polish stop material directly contacts at least oneof the tunnel barrier and the lower MTJ layer.

Example 21 includes a method comprising: forming a memory area,comprising a magnetic tunnel junction (MTJ) that includes a tunnelbarrier directly contacting lower and upper MTJ layers, on a monolithicsubstrate; and forming a logic area located on the substrate; wherein ahorizontal plane, which is parallel to the tunnel barrier, intersectsthe MTJ, a first Inter-Layer Dielectric (ILD) material adjacent the MTJ,and a second ILD material included in the logic area, the first andsecond ILD materials being unequal to one another. The logic area mayinclude logic gates and the memory area may include a memory array. Thelogic area may include a processor and the memory area may include amemory array.

In Example 22, the subject matter of Example 21 can optionally includeforming a sidewall of the upper MTJ layer horizontally offset ahorizontal offset distance from a sidewall of the lower MTJ layer.

In Example 23, the subject matter of Examples 21-22 can optionallyinclude forming a hardmask directly contacting an upper surface of theupper MTJ layer; and forming comprising a spacer, having a width equalto the horizontal offset distance, in direct contact with the upper MTJlayer and the tunnel barrier; wherein forming the hardmask and thespacer includes forming the hardmask and the spacer under a singlevacuum without discontinuing the single vacuum between forming thehardmask and the spacer.

In Example 24, the subject matter of Examples 21-23 can optionallyinclude all without discontinuing a single vacuum condition, (a) forminga hardmask directly contacting the upper MTJ layer; (b) forming aspacer, having a width equal to the horizontal offset distance, indirect contact with the upper MTJ layer and the tunnel barrier; (c)etching the upper MTJ layer, tunnel barrier, and lower MTJ layer to formthe MTJ; and (d) forming an etch stop film on the MTJ.

In Example 25, the subject matter of Examples 21-24 can optionallyinclude forming sacrificial light absorbing material (SLAM) betweenvertical portions of the top MTJ layer; and polishing the SLAM.

While the present invention has been described with respect to a limitednumber of embodiments, those skilled in the art will appreciate numerousmodifications and variations therefrom. It is intended that the appendedclaims cover all such modifications and variations as fall within thetrue spirit and scope of this present invention.

1. (canceled)
 2. An apparatus comprising: a first magnetic tunneljunction (MTJ) including a first upper MTJ layer, a first lower MTJlayer, and a first tunnel barrier directly contacting a first lowersurface of the first upper MTJ layer and a first upper surface of thefirst lower MTJ layer; a first spacer; and a first Inter-LayerDielectric (ILD) material; wherein the first upper MTJ layer includes afirst upper MTJ layer sidewall and the first lower MTJ layer includes afirst lower MTJ sidewall horizontally offset from the first upper MTJlayer sidewall by a first horizontal offset space that defines a firsthorizontal offset distance; wherein the first spacer, having a firstmaximum width no wider than the first horizontal offset distance,directly contacts at least one of the first upper MTJ layer and thefirst tunnel barrier; wherein a first horizontal plane, which isparallel to the first lower surface, intersects a first polish stopmaterial that is included between the first MTJ and the first ILDmaterial; wherein (a) the first ILD material includes silicon andoxygen, (b) the first lower MTJ layer includes cobalt, iron, boron, andruthenium, (c) the first tunnel barrier includes magnesium and oxygen,(d) the first upper MTJ layer includes cobalt, iron, boron, ruthenium,and tantalum, (e) the first spacer includes silicon and oxygen, and (f)the first polish stop material includes silicon and nitrogen.
 3. Theapparatus of claim 2 wherein the first spacer directly contacts thefirst upper MTJ layer and the first tunnel barrier.
 4. The apparatus ofclaim 3 comprising: a first hardmask contacting a first upper surface ofthe first upper MTJ layer and the first spacer; wherein the firsthardmask includes tantalum.
 5. The apparatus of claim 2 wherein thefirst spacer is included entirely within the first horizontal offsetspace and no portion of the first spacer extends horizontally beyond thefirst horizontal offset space.
 6. The apparatus of claim 2 including: amonolithic substrate; a memory area including the first MTJ; and a logicarea; wherein the logic area and the memory are both located on themonolithic substrate; wherein the first horizontal plane intersects thefirst MTJ, the first ILD material, which is adjacent the first MTJ, anda second ILD material included in the logic area; wherein the first andsecond ILD materials are unequal to one another.
 7. The apparatus ofclaim 6 wherein the logic area is included in a processor and the memoryis spin torque transfer magnetoresistive random access memory(STT-MRAM).
 8. The apparatus of claim 6 wherein: the second ILD materialincludes at least one of silicon oxide, silicon oxynitride, poroussilicon oxide, fluorinated silicon oxide, carbon-doped oxide, porouscarbon-doped oxide, polyimide, polynorbornene, benzocyclobutene,flowable oxide, and polytetrafluoroethylene; and the first ILD materialincludes a first chemical composition and the second ILD materialincludes a second chemical composition unequal to the first chemicalcomposition.
 9. The apparatus of claim 2 wherein the first polish stopmaterial directly contacts at least one of the first tunnel barrier andthe first lower MTJ layer.
 10. The apparatus of claim 2 comprising: amonolithic substrate; a memory area including the first MTJ; and a logicarea; wherein the first spacer directly contacts the first upper MTJlayer and the first tunnel barrier; wherein the logic area and thememory are both located on the monolithic substrate; wherein the firsthorizontal plane intersects the first MTJ, the first ILD material, whichis adjacent the first MTJ, and a second ILD material included in thelogic area; wherein the first and second ILD materials are unequal toone another.
 11. The apparatus of claim 10 comprising: a vertical MTJlayer portion, an additional vertical MTJ layer portion, and a verticaltunnel barrier portion directly contacting the vertical MTJ layerportion and the additional vertical MTJ layer portion; wherein thevertical MTJ layer portion, the additional vertical MTJ layer portion,and the vertical tunnel barrier portion are all between the logic andmemory areas and are all intersected by the first horizontal plane. 12.The apparatus of claim 2 comprising: a second MTJ including a secondupper MTJ layer, a second lower MTJ layer, and a second tunnel barrierdirectly contacting a second lower surface of the second upper MTJ layerand a second upper surface of the second lower MTJ layer; wherein thesecond upper MTJ layer includes a second upper MTJ layer sidewall andthe second lower MTJ layer includes a second lower MTJ sidewallhorizontally offset from the second upper MTJ layer sidewall by a secondhorizontal offset space that defines a second horizontal offsetdistance; and a first vertical polish stop sidewall, including the firstpolish stop material, contacting at least one of the first lower MTJlayer and the first tunnel barrier and a second vertical polish stopsidewall contacting at least one of the second lower MTJ layer and thesecond tunnel barrier; wherein (a) the first and second vertical polishstop sidewalls are located between the first and second MTJs and (b) thefirst horizontal plane intersects the first and second MTJs, and thefirst and second vertical polish stop sidewalls.
 13. The apparatus ofclaim 2 comprising: a vertical MTJ layer portion, an additional verticalMTJ layer portion, and a vertical tunnel barrier portion directlycontacting the vertical MTJ layer portion and the additional verticalMTJ layer portion; wherein the vertical MTJ layer portion, theadditional vertical MTJ layer portion, and the vertical tunnel barrierportion are all between logic and memory areas included in the apparatusand are all intersected by a first horizontal plane.
 14. An apparatuscomprising: a monolithic substrate; a memory area, comprising a magnetictunnel junction (MTJ) that includes a tunnel barrier directly contactinglower and upper MTJ layers, located on the substrate; and a logic arealocated on the substrate; wherein a horizontal plane, which is parallelto the tunnel barrier, intersects the MTJ, a first Inter-LayerDielectric (ILD) material adjacent the MTJ, and a second ILD materialincluded in the logic area; wherein the first ILD material includes afirst chemical composition and the second ILD material includes a secondchemical composition unequal to the first chemical composition; whereinthe upper MTJ layer includes an upper MTJ layer sidewall and the lowerMTJ layer includes a lower MTJ sidewall horizontally offset from theupper MTJ layer sidewall by a horizontal offset space that defines ahorizontal offset distance; wherein (a) the first ILD material includessilicon and oxygen, (b) the first lower MTJ layer includes cobalt, iron,boron, and ruthenium, (c) the first tunnel barrier includes magnesiumand oxygen, and (d) the first upper MTJ layer includes cobalt, iron,boron, ruthenium, and tantalum.
 15. The apparatus of claim 14comprising: a spacer, having a width equal to the horizontal offsetdistance, directly contacting the upper MTJ layer and the tunnelbarrier; wherein the spacer includes silicon and oxygen.
 16. Theapparatus of claim 15 further comprising: a hardmask directly contactingan upper surface of the upper MTJ layer and the spacer; wherein thefirst hardmask includes tantalum.
 17. The apparatus of claim 14 wherein:the horizontal plane intersects polish stop material included betweenthe MTJ and the first ILD material; the polish stop material includessilicon and nitrogen.
 18. The apparatus of claim 17 wherein the polishstop material directly contacts at least one of the tunnel barrier andthe lower MTJ layer.
 19. An apparatus comprising: a first magnetictunnel junction (MTJ) including a first upper MTJ layer, a first lowerMTJ layer, and a first tunnel barrier directly contacting a first lowersurface of the first upper MTJ layer and a first upper surface of thefirst lower MTJ layer; a first spacer; and a vertical MTJ layer portion,an additional vertical MTJ layer portion, and a vertical tunnel barrierportion directly contacting the vertical MTJ layer portion and theadditional vertical MTJ layer portion; wherein the first upper MTJ layerincludes a first upper MTJ layer sidewall and the first lower MTJ layerincludes a first lower MTJ sidewall horizontally offset from the firstupper MTJ layer sidewall by a first horizontal offset space that definesa first horizontal offset distance; wherein the first spacer, having afirst maximum width no wider than the first horizontal offset distance,directly contacts at least one of the first upper MTJ layer and thefirst tunnel barrier; wherein the vertical MTJ layer portion, theadditional vertical MTJ layer portion, and the vertical tunnel barrierportion are all between logic and memory areas included in the apparatusand are all intersected by a first horizontal plane; wherein (a) thefirst lower MTJ layer includes cobalt, iron, boron, and ruthenium, (b)the first tunnel barrier includes magnesium and oxygen, (c) the firstupper MTJ layer includes cobalt, iron, boron, ruthenium, and tantalum,and (e) the first spacer includes silicon and oxygen.
 20. The apparatusof claim 19 wherein: the horizontal plane intersects the first MTJ, afirst Inter-Layer Dielectric (ILD) material adjacent the first MTJ, anda second ILD material included in the logic area; the first ILD materialincludes a first chemical composition and the second ILD materialincludes a second chemical composition unequal to the first chemicalcomposition; the first ILD material includes silicon and oxygen.
 21. Theapparatus of claim 20 wherein the logic area is included in a processorand the memory is spin torque transfer magnetoresistive random accessmemory (STT-MRAM).
 22. The apparatus of claim 20 wherein: the horizontalplane intersects polish stop material included between the first MTJ andthe first ILD material; the polish stop material includes silicon andnitrogen.
 23. An apparatus comprising: a first magnetic tunnel junction(MTJ) including a first upper MTJ layer, a first lower MTJ layer, and afirst tunnel barrier directly contacting a first lower surface of thefirst upper MTJ layer and a first upper surface of the first lower MTJlayer; a first spacer; and a first hardmask directly contacting a firstupper surface of the first upper MTJ layer and the first spacer; whereinthe first upper MTJ layer includes a first upper MTJ layer sidewall andthe first lower MTJ layer includes a first lower MTJ sidewallhorizontally offset from the first upper MTJ layer sidewall by a firsthorizontal offset space that defines a first horizontal offset distance;wherein the first spacer, having a first maximum width no wider than thefirst horizontal offset distance, directly contacts at least one of thefirst upper MTJ layer and the first tunnel barrier wherein (a) the firstlower MTJ layer includes cobalt, iron, boron, and ruthenium, (b) thefirst tunnel barrier includes magnesium and oxygen, (c) the first upperMTJ layer includes cobalt, iron, boron, ruthenium, and tantalum, (d) thefirst hardmask includes tantalum, and (e) the first spacer includessilicon and oxygen.
 24. The apparatus of claim 23 comprising: a verticalMTJ layer portion, an additional vertical MTJ layer portion, and avertical tunnel barrier portion directly contacting the vertical MTJlayer portion and the additional vertical MTJ layer portion; wherein thevertical MTJ layer portion, the additional vertical MTJ layer portion,and the vertical tunnel barrier portion are all between logic and memoryareas included in the apparatus and are all intersected by a firsthorizontal plane.
 25. The apparatus of claim 24 wherein the logic areais included in a processor and the memory is spin torque transfermagnetoresistive random access memory (STT-MRAM).